Items where Author is "Chen, Yida"
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Article
Wang, Yuxi and Chen, Yida and Zhang, Yong and Zhu, Zhaoxin and Wu, Tao and Kou, Xufeng and Ding, Pingping and Corcolle, Romain and Kim, Jangyong (2021) Experimental Characterization of ALD Grown Al2O3 Film for Microelectronic Applications. Advances in Materials Physics and Chemistry, 11 (01). pp. 7-19. ISSN 2162-531X